Oxime derivatives and the use thereof as latent acids
AssigneeCiba Specialty Chemicals Corporation
InventorsHitoshi Yamato, Toshikage Asakura, Jean-Luc Birbaum, Kurt Dietliker
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AssigneeCiba Specialty Chemicals Corporation
InventorsHitoshi Yamato, Toshikage Asakura, Jean-Luc Birbaum, Kurt Dietliker
Estimating the term…
New oxime derivatives of formula (I) or. (II), wherein m is 0 or 1; R1 inter alia is phenyl, naphthyl, anthracyl, phenanthryl or a heteroaryl radical; R′1 is for example C2-C12alkylene, phenylene, naphthylene; R2 is CN; R3 is C2-C6haloalkanoyl, halobenzoyl, a phosphoryl or an organosilyl group; R4, R5, R10 and R11 inter alia are hydrogen, C1-C6alkyl, C1-C6alkoxy; R6 inter alia is hydrogen phenyl, C1-C12alkyl; R7 and R8 inter alia are hydrogen, C1-C12alkyl; or R7 and R8, together with the nitrogen atom to which they are bonded, form a 5-, 6 or 7-membered ring; R9 is for example C1-C12alkyl; and A inter alia is S, O, NR7a; are useful as latent acids, especially in photoresist applications.
Compounds of formulae I or II
Dependencies are inferred from the claim text.