Three-dimensional structure transfer method and apparatus
AssigneeFujitsu Limited
InventorsOsamu Toyoda, Akira Tokai, Motonari Kifune, Keiichi Betsui
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Abstract
A method for transferring a three-dimensional structure onto a substrate, which includes filling a plurality of concaves arranged on a sheet-form mold with a paste-like structural material, temporarily fixing the mold to a support member, contact-bonding the structural material in a state in which the structural material has the adhesion property or bonding property to the substrate together with the mold, releasing the temporary fixation of the mold by the support member after the contact-bonding, and removing the mold from the substrate, thereby transferring a three-dimensional structure onto the substrate.
Claims10
A three-dimensional structure transfer method for transferring a three-dimensional structure onto a substrate, comprising the steps of:
- preparing a paste-like material which can exert an adhesion property of a bonding property after curing or semi-curing, filling a plurality of concaves arranged on a sheet-form mold with the paste-like material, and curing or semi-curing the paste-like material;
- temporarily fixing the sheet-form mold to a support member;
- aligning the sheet-form mold and the substrate and then contact-bonding the paste-like material in a state in which the paste-like material has the adhesion property or bonding property to the substrate together with the sheet-form mold, using the support member;
- releasing the temporary fixation of the sheet-form mold by the support member after the contact-bonding;
- and
- peeling the sheet-form mold from the substrate, thereby transferring a three-dimensional structure onto the substrate.
The three-dimensional structure transfer method according to clam 1, wherein the contact-bonding of the paste-like material to the substrate and the release of the temporary fixation of the sheet-form mold are carried out by sticking the whole sheet-form mold to the substrate and then releasing the temporary fixation of the sheet-form mold.
A three-dimensional structure transfer method for transferring a three-dimensional structure onto a substrate, comprising the steps of:
- preparing a paste-like material which can exert an adhesion property of a bonding property after curing or semi-curing, filling a plurality of concaves arranged on a sheet-form mold with the paste-like material, and curing or semi-curing the paste-like material;
- temporarily fixing the sheet-form mold to a support member;
- aligning the sheet-form mold and the substrate and then contact-bonding the past-like material in a state in which the paste-like material has the adhesion property or bonding property to the substrate together with the sheet-form mold;
- releasing the temporary fixation of the sheet-form mold by the support member after the contact-bonding;
- and
- removing the sheet-form mold from the substrate, thereby transferring a three-dimensional structure onto the substrate;
- wherein the support member is formed of a printing device in which a screen is provided with tension in a horizontal frame and a plate having flexibility is supported on the screen.
Dependencies are inferred from the claim text.