Contaminant collector trap for ion implanter

An evacuation system for a chamber, comprising:

• (i) a pump for removing gases and contaminants from the chamber, said pump having an outlet connected to an exhaust duct;
• and
• (ii) a collector trap for use in collecting contaminants evacuated from an evacuated chamber, the collector trap positioned between the pump outlet and the exhaust duct and comprising:
• a gas/contaminant separator having an inlet for introducing gases and contaminants therein, said separator functioning to physically separate the gases and contaminants;
• a contaminant collector for collecting the separated contaminants, said collector including an extractor coupling for allowing extraction of the contaminants from the collector;
• and an outlet for allowing the separated gases to exit the gas/contaminant separator, the outlet comprising an optical baffle for collecting contaminants that are not physically separated from the gasses be the gas/contaminant separator, the optical baffle comprising partially overlapping fins extending inwardly therefrom.