Process chamber
AssigneeLevitronix LLC
InventorReto Schöb
Life of this patent
Estimating the term…
Abstract
In a process chamber (1), in which various processing steps in the manufacture of semiconductors can be carried out, there is arranged a rotationally drivable rotary head (3) which serves as a holder for a substantially disc-shaped object to be processed (W), e.g. for a wafer. Furthermore, at least one applicator (50, 51, 52, 53) is provided in the process chamber (1) for the provision of a medium which acts on the object to be processed (W). Means (4) are arranged radially around the rotary head (3) for the journalling and for the driving of the rotary head (3).
Claims15
A process chamber in which various processing steps in the manufacture of semiconductors can be carried out for a wafer comprising:
- a process chamber (1) having an interior for the processing of a disc-shaped object and an exterior for isolating the disc-shaped object during processing;
- a rotationally driven rotary head (3) in the process chamber (1), the rotationally driven rotary head (3) serving as a holder to expose a substantially disc-shaped object to be processed (W) from either side of the disc-shaped object within the interior of the process chamber (1);
- at least one applicator (50, 51, 52, 53) being provided in the process chamber for the provision of a medium which acts on the disc-shaped object to be processed (W) from either side of the disc-shaped object;
- and,
- means (4) to suspend and drive the rotary head (3) without contact, the means (4) to suspend and drive the rotary head (3) being arranged radially around the rotary head (3) on the exterior of the process chamber (1).
Dependencies are inferred from the claim text.