Platen arrangement for a chemical-mechanical planarization apparatus
AssigneeApplied Materials, Inc.
InventorsShijian Li, Fred C. Redeker, John White, Manoocher Birang
Life of this patent
Estimating the term…
Abstract
A chemical mechanical polishing machine is provided with a platen that has an integral sub-pad. A fixed abrasive polishing layer is mounted, without adhesive between the polishing layer and the sub-pad, to the top surface of the platen and the sub-pad. The polishing layer is vacuum mounted, for example, to the integral sub-pad of the platen. A cooling arrangement is provided in the platen that cools the polishing layer and improves product quality.
Claims20
A platen for a fixed abrasive pad chemical-mechanical polishing/planarization arrangement, comprising:
- a platen housing;
- a sub-structure integrally mounted on the platen housing;
- and
- a vacuum mounting arrangement configured to removably mount a fixed abrasive layer to the sub-structure,
- wherein the vacuum mounting arrangement includes suction holes at a top surface of the sub-structure vacuum connections through the sub-structure configured to connect the suction holes to a vacuum source,
- wherein the sub-structure includes a bottom cushion layer and an upper structural layer on the cushion layer.
A platen for a fixed abrasive pad chemical-mechanical polishing/planarization arrangement, comprising:
- a platen housing;
- a sub-structure integrally mounted on the platen housing;
- and
- a vacuum mounting arrangement configured to removably mount a fixed abrasive layer to the sub-structure
- a cooling fluid arrangement in the platen that supplies cooling fluid to the sub-structure to cool the sub-structure.
A chemical-mechanical polishing machine comprising:
- a platen housing;
- a sub-structure integral with the platen housing, said sub-structure comprising a bottom cushion layer and an upper structural layer on the cushion layer;
- and
- a mounting arrangement configured to removably mount a fixed abrasive layer to the upper structural layer of the sub-structure.
A method of mounting a fixed abrasive layer to a platen arrangement, comprising the steps of:
- providing a platen with an integral sub-structure comprising a bottom cushion layer and an upper structural layer on the cushion layer;
- and
- removably mounting a fixed abrasive layer on the sub-structure by vacuum mounting the fixed abrasive layer t o the sub-structure.
Dependencies are inferred from the claim text.