Distributed MEMS electrostatic pumping devices

A MEMS electrostatic pump device, comprising:

• a substrate;
• at least one substrate electrode disposed upon said substrate;
• a first moveable membrane having a generally rectangular top plan view shape that generally overlies said at least one substrate electrode;
• a second moveable membrane having a generally rectangular top plan view shape that generally overlies said at least one substrate electrode;
• a third moveable membrane having a generally triangular top plan view shape that generally overlies said at least one substrate electrode;
• a fourth moveable membrane having a generally triangular top plan view shape that generally overlies said at least one substrate electrode, wherein said first, second, third and fourth moveable membranes each comprise at least one electrode element and a biasing element, wherein said first, second, third and fourth moveable membranes each include a fixed portion attached to said substrate and a distal portion extending from the fixed portion, the distal portion being moveable with respect to said substrate electrode;
• and
• a dielectric element disposed between said at least one substrate electrode and said at least one electrode element of said first, second, third and fourth moveable membranes,
• whereby a voltage differential established between said at least one substrate electrode and said at least one electrode element of said first, second, third and fourth moveable membranes moves said first, second, third and fourth moveable membranes relative to said substrate to thereby controllably distribute matter residing between the substrate and the distal portion of said first, second, third and fourth moveable membranes.

A MEMS (Micro Electro Mechanical System) electrostatic pump device, comprising:

• a substrate;
• at least one substrate electrode disposed upon said substrate;
• a first moveable membrane generally overlying said at least one substrate electrode, the first moveable membrane comprising a plurality of individually addressable electrode elements to controllably activate predetermined regions in the first moveable membrane and a biasing element, wherein the first moveable membrane includes a fixed portion attached to said substrate and a distal portion extending from the fixed portion, the distal portion being moveable with respect to said substrate electrode;
• and
• a dielectric element disposed between said at least one substrate electrode and said at least one electrode element of said first moveable membrane,
• wherein a voltage differential established between said at least one substrate electrode and said at least one of said plurality of individually addressable electrode elements moves said first moveable membrane relative to said substrate to thereby controllably distribute matter residing between the substrate and the distal portion of said first moveable membrane.

A MEMS (Micro Electro Mechanical System) electrostatic pump device, comprising:

• a substrate;
• at least one substrate electrode disposed upon said substrate;
• a first moveable membrane generally overlying said at least one substrate electrode, the first moveable membrane comprising at least one electrode element and a biasing element that includes two polymer film layers on opposite sides of said at least one electrode element, wherein the first moveable membrane includes a fixed portion attached to said substrate and a distal portion extending from the fixed portion, the distal portion being moveable with respect to said substrate electrode;
• and
• a dielectric element disposed between said at least one substrate electrode and said at least one electrode element of said first moveable membrane,
• wherein a voltage differential established between said at least one substrate electrode and said at least one electrode element moves said first moveable membrane relative to said substrate to thereby controllably distribute matter residing between the substrate and the distal portion of said first moveable membrane.