Energy dissipating coupling
AssigneeApplied Materials, Inc.
InventorMatthew Fenton Davis
Life of this patent
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Abstract
An apparatus and method for coupling a device to a semiconductor processing chamber is provided. The apparatus generally comprises a first ring disposed proximate a second ring. An energy dissipating media is disposed between the first and second rings. Upon the application of a torsional force in excess of a predetermined amount, the first ring rotates relative to the second ring. The energy dissipating media absorbs or dissipates some or all the energy applied to the first and second rings.
Claims31
Apparatus for coupling a device to a processing chamber comprising:
- a first ring;
- a second ring adapted to rotate relative to the first ring;
- an energy dissipation ring disposed between said first ring and said second ring;
- and
- a turbomolecular pump coupled to said second ring.
A processing system comprising:
- a chamber having an exhaust port;
- a device having a housing and a rotating component disposed within said housing;
- and
- a energy dissipating coupling disposed between said exhaust port and said housing of said device, said energy dissipating coupling having:
- a first ring coupled to said chamber;
- and
- an energy dissipation ring disposed proximate said first ring.
Apparatus for coupling a device to a processing chamber comprising:
- a first ring;
- a second ring adapted to rotate relative to the first ring;
- an energy dissipation ring disposed between said first ring and said second ring;
- and
- a loading means for urging the second ring against the energy dissipation ring.
Dependencies are inferred from the claim text.