Multiple wafer lift apparatus and associated method
AssigneeApplied Materials, Inc.
InventorWilliam N. Taylor, Jr.
Life of this patent
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Abstract
An apparatus and associated method for transporting a first substrate and a second substrate relative to a cell. The cell contains a pedestal that is configured to interact with a single substrate. When swapping wafers in a cell, a first substrate is displaced from the pedestal to a remote location and a second substrate is inserted into the cell and onto the pedestal. The first substrate is then removed from the cell.
Claims20
An apparatus interacting with a pedestal within a cell, the pedestal is configured to support a single substrate, the apparatus comprising:
- a first substrate lift comprising a support element that can be displaced between an upright and an outwardly displaced position, said first substrate lift being capable of displacing a first substrate from the pedestal in a position within the cell that permits a second substrate to be supported relative to the pedestal.
A method of transporting a first substrate and a second substrate relative to a cell, the cell contains a pedestal, the pedestal is configured to interact with a single substrate, the method comprising:
- moving a first substrate lift from an outwardly displaced position into a position beneath a first substrate;
- vertically displacing the first substrate from the pedestal to a remote location;
- and
- inserting a second substrate using a robot blade into the cell and onto the pedestal, said second substrate being placed Into contact with the pedestal.
A method of swapping a first substrate and a second substrate within a cell, the method comprising:
- inserting the first substrate into the cell, the first substrate being positioned upon a pedestal;
- moving a first substrate lift from an outwardly displaced position into a position beneath a first substrate;
- vertically displacing the first substrate to a position to permit insertion of the second substrate;
- and
- inserting the second substrate into the cell, said second substrate being placed upon a second substrate lift.
A computer readable medium that stores software that, when executed by a processor, causes a system to transport a first substrate and a second substrate relative to a pedestal, the pedestal is contained in a cell, the software executed by the processor performs a method comprising:
- moving a first substrate lift from an outwardly displaced position into a position beneath the first substrate;
- vertically displacing the first substrate from the pedestal to a remote location;
- and
- inserting a second substrate using a robot blade into the cell and onto the pedestal.
Dependencies are inferred from the claim text.