Substrate processing method and substrate processing apparatus

A substrate processing apparatus having a mounting portion for mounting a substrate cassette housing a plurality of substrates, a cassette station including a delivery device for delivering the substrate to the substrate cassette mounted on the mounting portion, and a process station connected to the cassette station for processing the substrate transferred by the delivery device,

• wherein the process station, comprising:
• a cooling plate for cooling the substrate;
• a coating processing section for coating a processing solution onto the substrate;
• a substrate transfer device for transferring the substrate cooled by said cooling plate to said coating processing section;
• a temperature detector for detecting the temperature of an area to where the substrate is transferred by said substrate transfer device;
• and
• a control section for adjusting the temperature of said cooling plate based on a detected value by said temperature detector so that the temperature of the substrate when transferred to said coating processing section becomes the same with a coating temperature of the processing solution.

A substrate processing apparatus having a mounting portion for mounting a substrate cassette housing a plurality of substrates, a cassette station including a delivery device for delivering the substrate to the substrate cassette mounted on the mounting portion, and a process station connected to the cassette station for processing the substrate transferred by the delivery device,

• wherein the process station, comprising:
• a cooling plate for cooling the substrate;
• a coating processing section for coating a processing solution onto the substrate;
• a substrate transfer device for transferring the substrate between said cooling plate and said coating processing section;
• and
• a gas supply part for supplying the gas to the surface to be processed of the substrate with its temperature adjusted, while the substrate is transferred from said cooling plate to said coating processing section by said substrate transfer device.

A substrate processing apparatus, comprising:

• a cooling plate for cooling a substrate;
• a coating processing section for coating a processing solution onto the substrate;
• a substrate transfer device for transferring the substrate cooled by said cooling plate to said coating processing section;
• a temperature detector for detecting the temperature of an area to where the substrate is transferred by said substrate transfer device;
• and
• a control section for adjusting the temperature of said cooling plate so that the temperature of the substrate when transferred to said coating processing section becomes the same with a coating temperature of the processing solution based on a detected value by said temperature detector.