Holding apparatus
AssigneeAdvantest Corporation
InventorsToshio Kashiwazaki, Norivuki Igarashi, Haruki Nakajima
Life of this patent
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Abstract
A device holding apparatus comprising a base plate; a hollow pad guard provided on the base plate; a pad pin inserted to the pad guard movably in an axis direction and having a through hole; a pad provided at a tip of the pad pin and having a through hole connected to the through hole of the pad pin; and a bellows pad provided on the base plate, having a through hole connected to the through hole of the pad pin and being elastic in the axis direction; for holding by suction a device by the pad by applying a negative pressure to the through hole of the bellows pad, the through hole of the pad pin and the through hole of the pad.
Claims8
A device holding apparatus, comprising:
- a base plate comprised of a conductive material;
- a hollow pad guard provided on said base plate;
- a pad pin comprised of a conductive material and inserted to said pad guard movably in an axis direction and having a through hole;
- a pad comprised of a conductive material and provided at a tip of said pad pin and having a through hole connected to the through hole of the pad pin;
- and
- a bellows pad provided on said base plate, having a through hole connected to the through hole of said pad pin and being elastic in the axis direction;
- for holding by suction a device by said pad by applying a negative pressure to the through hole of said bellows pad, the through hole of said pad pin and the through hole of said pad.
Dependencies are inferred from the claim text.