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US 6,484,579 B2Granted
Trim balancing of second-order non-linearity in double ended tuning fork resonators
AssigneeHoneywell International Inc.
InventorPaul Collins
Life of this patent
Estimating the term…
Abstract
A double-ended tuning fork (DETF) sensor having one or more mass balance tabs for equalizing second-order, K2, non-linearity terms between two DETFs, and methods for manufacturing the same.
Claims14
A double-ended tuning fork (DETF) sensor comprising:
- a first and a second DETF, each of said DETFs having first and second tines joined at first and second ends;
- a proof mass;
- a support frame;
- at least one hinge rotatably connecting said proof mass to said support frame;
- said first ends of said DETFs spaced apart and connected to said proof mass and said second ends of said DETFs connected directly to said support frame;
- and a mass balance disposed on each tine of said first DETF such that a first second-order non-linearity term associated with said first DETF is substantially equal in magnitude to a second second-order non-linearity term associated with said second DETF.
3 more elements
A double-ended tuning fork (DETF) sensor, comprising:
- a first and a second DETF, each of said DETFs having a first end and a second end;
- a proof mass;
- a support frame,
- at least one hinge rotatably connecting said proof mass to said support frame;
- said first ends of said DETFs spaced apart and connected to said proof mass and said second ends of said DETFs connected to said support frame;
- wherein said first DETF and said second DETF are constructed having two tines;
- first mass balances projecting from each of said tines of said first DETF, said first mass balances sized and positioned to form a first second-order non-linearity term associated with said first DETF;
- and
- second mass balances projecting from each of said tines of said second DETF, said second mass balances sized and positioned to form a second second-order non-linearity term associated with said second DETF such that said second second-order non-linearity term is substantially equal in sign and magnitude to said first second-order non-linearity term.
6 more elements
A double-ended tuning fork (DETF) sensor, comprising:
- a generally planar silicon substrate formed with an epitaxial layer on one surface thereof;
- first and second DETFs formed in said epitaxial layer, each of said DETFs having a first and second tine joined at a first end and a second end;
- a support frame formed in said substrate,
- a proof mass formed in said substrate, said proof mass rotatably suspended from said support frame;
- said first ends of said DETFs spaced apart and connected to said proof mass and said second ends of said DETFs connected to said support frame;
- first trim balancing tabs projecting outwardly from each said tine of said first DETF, said first trim balancing tabs sized and positioned to form a first second-order non-linearity term associated with said first DETF;
- second trim balancing tabs projecting outwardly from each said tine of said second DETF, said second trim balancing tabs sized and positioned to form a second second-order non-linearity term associated with said second DETF, and
- wherein said size and said position of each of said first trim balancing tabs and said second trim balancing tabs are determined such that said first and said second second-order non-linearity terms are substantially equalized in sign and magnitude.
5 more elements
Dependencies are inferred from the claim text.