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US 6,484,578 B2Granted
Vibrating beam accelerometer
AssigneeAlliedSignal Inc.
InventorsJames R. Woodruff, Steven A. Foote
Life of this patent
Estimating the term…
Abstract
A pendulous accelerometer wherein the active reaction mass is pendulously mounted external to a fixed support structure and may include sensor cover of covers in the total active reaction mass.
Claims5
An apparatus for detecting an applied force comprising:
- a housing;
- a substrate comprising a semiconducting material and defining a frame formed with a passage, said frame fixed to said housing;
- a reaction mass defined by said substrate, said reaction mass comprising:
- a) first and second covers, said first cover substantially parallel with and spaced away from said second cover, and
- b) an internal pendulum portion suspended between said first and second covers, said internal pendulum portion positioned within said passage and rotatably suspended from said frame;
- an active layer of semiconducting material comprising one or more vibratory force transducers mechanically coupled to said frame and to said reaction mass for detecting a force applied thereto;
- and
- an insulating layer formed between said substrate and said active layer to insulate at least a portion of said vibratory transducers from said substrate.
5 more elements
An apparatus for detecting an applied force comprising:
- a housing;
- a frame fixed to said housing, said frame formed of a substantially planar substrate comprising a semiconducting material and formed with a passage;
- a reaction mass formed of said substrate, said reaction mass comprising:
- a) first and second substantially planar covers, said first cover substantially parallel with and spaced away from said second cover, and
- b) a substantially planar internal pendulum portion suspended between said first and second covers, said internal pendulum portion nominally positioned within said passage and rotatably attached to said frame;
- an active layer of semiconducting material comprising one or more vibratory force transducers mechanically coupled to said frame and to said reaction mass for detecting a force applied thereto;
- and
- an insulating layer formed between said substrate and said active layer to insulate at least a portion of said vibratory transducers from said substrate.
5 more elements
Dependencies are inferred from the claim text.