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US 6,484,576 B2Granted
Tuning-fork vibratory gyro
AssigneeFujitsu Limited
InventorsMasanori Yachi, Yoshio Satoh, Masaaki Ono, Yoshiro Fujiwara, Sumio Yamada, Hiroshi Ishikawa
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Abstract
A tuning-fork vibratory gyro has first and second arms and a base integrally connected to the first and second arms. The gyro includes drive electrodes used to generate tuning-fork vibrations due to a piezoelectric transversal effect, and detection electrodes provided on the first and second arms and used to output a detection voltage due to an angular velocity.
Claims10
A tuning-fork vibratory gyro having first and second arms and a base integrally connected to the first and second arms, said tuning-fork vibratory gyro comprising:
- drive electrodes used to generate tuning-fork vibrations due to a piezoelectric transversal effect, said drive electrodes being provided on at least one of first and second surfaces of each of the first and second arms opposite to each other;
- detection electrodes provided on at least one of the first and second surfaces of each of the first and second arms and used to output a detection voltage due to an angular velocity;
- and
- reference electrodes provided on at least one of the first and second surfaces of each of the first and second arms and connected to a reference potential,
- wherein the drive electrodes and the detection electrodes are located in the vicinity of root portion which are bifurcated from the base, and
- wherein the detection electrodes are provided next to the root portions and on the opposite side of the drive electrodes.
3 more elements
Dependencies are inferred from the claim text.