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US 6,483,938 B1Granted
System and method for classifying an anomaly
AssigneeTexas Instruments Incorporated
InventorsA. Kathleen Hennessey, YouLing Lin, Rajasekar Reddy, C. Rinn Cleavelin, Howard V. Hastings, II, Pinar Kinikoglu, Wan S. Wong
Life of this patent
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Abstract
A method and system for generating and managing a knowledgebase for use in identifying anomalies on a manufactured object, such as a semiconductor wafer, includes measures for adding, deleting, and organizing data from the knowledgebase.
Claims9
A method for classifying an anomaly of an object, the method comprising:
- preparing a primitive-based representation of an object having an anomaly;
- comparing the primitive-based representation of the object to a primitive-based reference image to detect and locate the anomaly;
- selecting a descriptor for the anomaly, the descriptor associated with a plurality of descriptor values;
- determining a first descriptor value of the anomaly using the primitive-based representation;
- comparing the first descriptor value with a second descriptor value associated with a defect class;
- determining a match between the first descriptor value and the second descriptor value;
- and
- classifying the anomaly as a defect according to the defect class.
5 more elements
A method of indexing an anomaly, the method comprising:
- preparing a primitive-based representation of an object having an anomaly;
- comparing the primitive-based representation of the object to a primitive-based reference image to detect and locate the anomaly;
- creating a file for the anomaly;
- selecting a descriptor having a descriptor value associated with the anomaly;
- creating a subdirectory for the file, the subdirectory associated with the descriptor;
- and
- using the descriptor value to name the subdirectory to produce a file name for the file of the anomaly.
4 more elements
Dependencies are inferred from the claim text.