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US 6,483,229 B2Granted
Method of providing differential frequency adjusts in a thin film bulk acoustic resonator (FBAR) filter and apparatus embodying the method
AssigneeAgilent Technologies, Inc.
InventorsJohn D. Larson, III, Paul D. Bradley, Richard C. Ruby
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Abstract
A method for fabricating a resonator, and in particular, a thin film bulk acoustic resonator (FBAR), and a resonator embodying the method are disclosed. An FBAR is fabricated on a substrate by mass loading piezoelectric (PZ) layer between two electrodes. For a substrate having multiple resonators, only selected resonator is mass loaded to provide resonators having different resonance frequencies on the same substrate.
Claims15
An apparatus comprising:
- a substrate;
- a first resonator fabricated on the substrate, the first resonator comprising
- a first bottom electrode;
- a first top electrode;
- a first piezoelectric (PZ) portion sandwiched between the first bottom electrode and the first top electrode, the first PZ portion being a portion of a core PZ layer;
- an additional PZ layer also sandwiched between the first bottom electrode and the first top electrode;
- a second resonator fabricated on the substrate, the second resonator comprising
- a second bottom electrode;
- a second top electrode;
- and
- a second PZ portion sandwiched between the second bottom electrode and the second top electrode such that the first resonator is fabricated having higher mass than the second resonator.
8 more elements
An apparatus comprising:
- a substrate;
- a first resonator fabricated on the substrate, the first resonator comprising
- a first bottom electrode;
- a first top electrode;
- a first piezoelectric (PZ) portion;
- a second resonator fabricated on the substrate, the second resonator comprising
- a second bottom electrode;
- a second top electrode;
- and
- a second PZ portion, the second PZ portion having a thickness less than thickness of the first PZ portion.
7 more elements
Dependencies are inferred from the claim text.