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AssigneeDaido Air Products Electronics, Inc.
InventorsFumio Kawasaki, Rosuke Matsubayashi
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A PFC separation recovery method to separate and recover PFC by raising the pressure of diluted mixed gas consisting of PFC gas and diluent gas, and subsequently contacting the gas with a membrane which permeates more diluent gas than PFC gas, and to separate it into a permeable gas flow rich in diluent gas and a non-permeable gas flow rich in PFC gas; and a PFC separation recovery system therefor. Moreover, the method repeatedly separates the non-permeable gas flow into another permeable gas flow and another non-permeable gas flow by contacting the gas flow with another membrane having the same functions as those of the membrane; subsequently detecting the pressure or flow rate of the other permeable gas flow; and controlling the flow rate of the other non-permeable gas flow so as to make the pressure or flow rate constant.
A perfluoro compound separation recovery method for separating and recovering perfluoro compound gas by contacting it with a membrane which permeates more diluent gas than perfluoro compound gas, after high-pressurizing diluted mixed gas consisting of perfluoro compound gas and diluent gas, comprising the steps of separating high-pressurized diluted mixed gas into a permeable gas flow rich in diluent gas and a non-permeable gas flow rich in perfluoro compound gas by contacting it to the membrane;
A perfluoro compound separation recovery system including a means to raise pressure of diluted mixed gas consisting of perfluoro compound gas and diluent gas, and a membrane to separate high-pressurized diluted mixed gas into a permeable gas flow rich in diluent gas and a non-permeable gas flow rich in perfluoro compound gas;
Dependencies are inferred from the claim text.