Micropattern measuring method and apparatus, and recording medium that records micropattern measuring program
AssigneeKabushiki Kaisha Toshiba
InventorYumiko Miyano
Life of this patent
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Abstract
An image acquiring section acquires a pattern image of a sample. A figure creating section creates a figure, which reflects a shape of the micropattern, on the basis of the pattern image. A density distribution data acquiring section acquires density distribution data on a straight line perpendicular to a tangential line of an outline of the figure. An edge detecting section detects pattern edge coordinates from the density distribution data. A pattern shape measuring section measures a shape of the micropattern on the basis of the pattern edge coordinates.
Claims8
A micropattern measuring method, comprising the steps of:
- acquiring a pattern image of a sample provided with a micropattern formed thereon;
- creating a figure, which reflects a shape of the micropattern, on the basis of the pattern image;
- acquiring density distribution data on a straight line perpendicular to a tangential line of an outline of the figure;
- detecting pattern edge coordinates from the density distribution data;
- and
- measuring a shape of the micropattern on the basis of the pattern edge coordinates.
A micropattern measuring apparatus, comprising:
- a pattern image acquiring section for acquiring a pattern image of a sample;
- a figure creating section for creating a figure, which reflects a shape of the micropattern, on the basis of the pattern image;
- a density distribution data acquiring section for acquiring density distribution data on a straight line perpendicular to a tangential line of an outline of the figure;
- an edge detecting section for detecting pattern edge coordinates from the density distribution data;
- and
- a pattern shape measuring section for measuring a shape of the micropattern on the basis of the pattern edge coordinates.
A recording medium recording a micropattern measuring program for supplying a computer with:
- a function of acquiring a pattern image of a sample;
- a function of creating a figure, which reflects a shape of the micropattern, on the basis of the pattern image;
- a function of acquiring density distribution data on a straight line perpendicular to a tangential line of an outline of the figure;
- a function of detecting pattern edge coordinates from the density distribution data;
- and
- a function of measuring a shape of the micropattern on the basis of the pattern edge coordinates.
Dependencies are inferred from the claim text.