Micro-mirror and actuator with extended travel range
AssigneeNew Jersey Institute of Technology
InventorsKenneth R. Farmer, III, Richard A. Brown, Xing-tao Wu
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Abstract
The travel range is extended for electrostatically actuated micro mirrors used as attenuators, modulators and switches in optical networks by the use of dielectrically coated, preferably with Silicon dioxide, inner surfaces. Oxide charge and oxide capacitance combine to expand the travel range of the mirrors before snap down, at the expense of increased applied bias voltage. This method of travel range extension is preferred over other range extension methods due to its simplicity, reproducibility, and ease of manufacture, as well as benefits of decreased stiction and inhibited electrode shorting. A method for the manufacture of the devices is also disclosed.
Claims33
A micro-mechanism apparatus for transmitting at least a portion of a beam of light from one light source to a receiving source in response to an electrical signal, said micro-mechanism comprising:
- an ultra-thin member having a given configuration;
- a substrate defining a cavity having a configuration slightly larger than said ultra-thin member to receive said ultra-thin member;
- resilient means secured to said ultra-thin member and to said substrate to bias said ultra-thin member to a given position relative to said substrate for movement of said ultra-thin member away from said given position toward and away from said cavity in said substrate;
- electrical insulation disposed between said ultra-thin member and said substrate within said cavity;
- a reflective surface on said ultra-thin member distal from said cavity;
- and
- actuation means to move said ultra-thin member toward said cavity.
Dependencies are inferred from the claim text.