Thermal bend actuator

Abstract

A thermal actuator for micro mechanical or micro electro-mechanical devices, the actuator comprising a supporting substrate, an actuator extension portion, a first arm attached at a first end thereof to the substrate and at a second end to the extension portion, the first arm being arranged, in use, to be conductively heatable, a second arm attached at a first end to the supporting substrate and at a second end to the extension portion, the second arm being spaced apart from the first arm, the first arm being arranged, in use, to undergo thermal expansion, thereby causing the actuator to apply a force to the extension portion, and wherein the first arm comprises at least one heat sink element substantially at a point of maximum heating of the first arm, being the point where, in use, maximum heating of the first arm would occur.

Dependencies are inferred from the claim text.