Recessed reflector single phase unidirectional transducer
AssigneeTRW Inc.
InventorsDavid S. Yip, Alvin M. Kong, Rahil U. Bhorania
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AssigneeTRW Inc.
InventorsDavid S. Yip, Alvin M. Kong, Rahil U. Bhorania
Estimating the term…
The invention relates to a new family of surface acoustic wave single-phase unidirectional transducers (SPUDTs) by using M uniform width, uniformly spaced, single-level interdigitated electrodes lying on a uniform grid of a piezoelectric substrate where unidirectionality is achieved by selectively etching reflective structures into the substrate either in the spaces located between adjacent electrodes or under selected electrodes of the transducer. A SAW filter, resonator or delay line can also be formed by fabricating two such transducers on a single substrate, each having surface acoustic waves radiating towards the other.
A surface acoustic wave transducer having a transduction length measured in wavelengths, comprising:
A surface acoustic wave transducer having a transduction length measured in wavelengths, comprising:
A surface acoustic wave transducer having a transduction length measured in wavelengths, comprising:
A surface acoustic wave transducer having a transduction length measured in wavelengths, comprising:
A surface acoustic wave transducer having a transduction length measured in wavelengths, comprising:
A surface acoustic wave filter comprising:
A surface acoustic wave filter comprising:
Dependencies are inferred from the claim text.
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From the US filing history. Foreign family members aren’t listed.
Surface acoustic wave [SAW] transducers for a particular purpose: unidirectional SAW transducers
For the manufacture of electromechanical resonators or networks: for the manufacture of resonators or networks using surface acoustic waves
Details concerning reflective or coupling arrays: grooves or arrays buried in the substrate
Formation: multilayer finger or busbar electrode
Term ended 21 Dec 2020 (estimated)
USPTO file history isn’t available for this patent, so only indexed dates are shown.
1. Field of the Invention
The present invention relates generally to surface acoustic wave (SAW) transducers and, more specifically to a new family of surface acoustic wave single-phase unidirectional transducers (SPUDTs) by using uniform width, single-level electrodes lying on a uniform grid of a piezoelectric substrate where unidirectionality is achieved by selectively etching reflective structures into the substrate either in the spaces located between adjacent electrodes or under selected electrodes of the transducer. A SAW filter, resonator or delay line can also be formed by fabricating two such transducers on a single substrate, each having surface acoustic waves radiating towards the other.
2. Description of the Prior Art
Reference is now made to the following description and attached drawings, wherein:
FIG. 1a is a side cross-sectional view illustration of a recessed dot single-phase unidirectional transducer (RDSPUDT) in accordance with an embodiment of the present invention;
FIG. 1b is a of a top view illustration of the RDSPUDT shown in FIG. 1a;
The present invention discloses a new family of single-phase unidirectional transducers (SPUDTs). This new family of SPUDTs, referenced herein as recessed reflector SPUDTs (RRSPUDTs) include, recessed dot single-phase unidirectional transducers (RDSPUDTs), recessed gap single-phase unidirectional transducers (RGSPUDTs) and recessed finger single-phase unidirectional transducers (RFSPUDTs). Generally, these transducers are comprised of uniform width, single-level electrode fingers (electrodes) lying in a uniform grid on a surface of a piezoelectric substrate with recessed reflectors selectively etched into the substrate surface either between certain adjacent electrodes or under selected electrode fingers. The transducer sampling rates are of the general form Nλ/M, where M is equal to the number of electrodes per every Nλ of the transducer's transduction length, and where M and N are integers and M>N. The transduction length is measured in wavelengths (λ) and is defined as a length of the transducer in which one group of electrode fingers are connected to a common bus bar, and the other group of electrode fingers with the opposite polarity are connected to a separate common bus bar. Surface acoustic wave (SAW) generation takes place within the transduction length as a result of the transduction of the electrical excitation between the two groups of electrode fingers. Adjacent electrodes have a center-to-center spacing of Nλ/M and both the electrodes and the recessed reflectors provide sources of SAW reflection.
And by selectively locating the recessed reflectors and adjusting the reflectivity of each reflector, the net transducer reflection due to the recessed reflective structures is non-zero with predetermined magnitude and phase to achieve unidirectionality. Thus, unidirectionality is substantially achieved in the present invention by selectively etching recesses within selected gaps of a particular transducer or under selected electrode fingers of the transducer. However, it is important to note that the present invention does not require every Nλ of the transducer's transduction length to contain a recessed structure. Thus, the net transducer reflection due to the electrode reflection within a Nλ of the transduction length not containing such a structure is zero. And the zero reflection effect is a characteristic of the particular transducer's sampling rate.
For purposes of illustrating the fundamental principles of the present invention, the embodiments of the present invention are described herein using a transducer having a 3λ/5 sampling rate −5 electrode fingers per each 3λ of the transduction length—and a periodic electrode finger sequence of ‘−−+−+’, where ‘−’ is a negative polarity and ‘+’ is a positive polarity. In other words, the electrode sequence has a period of 5 electrode fingers within a transduction length of 3λ. However, it is important to note that these are not necessary limitations of the present invention thus it should be understood that the principles of the present invention are not limited to any particular transduction length, any particular sampling rate, or any particular periodic electrode finger sequence. For example, the recessed reflector SPUDTs (RRSPUDTs) disclosed by the present invention can exist for sampling rates that include, but are not limited to λ/4, λ/3, 2λ/5, 3λ/5, 3λ/7, 3λ/8, 4λ/7 and 5λ/8. It is also important to note that the RRSPUDTs disclosed by the present invention can be fabricated on any piezoelectric substrate including, but not limited to lithium niobate (LiNbO3), lithium tantalate (LiTaO3) and Quartz. Additionally, the electrode fingers can be formed from any metal commonly used in the SAW industry, including but not limited to aluminum alloy, chromium, gold, copper, and titanium.