Capacitive distance sensor for surface configuration determining apparatus
AssigneeMitutoyo Corporation
InventorsKiyokazu Okamoto, Sotomitsu Hara, Nobuhisa Nishioka
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Abstract
A capacitive distance sensor adapted to measure a distance between an object and the sensor device, which is suitable for determining surface configuration of an object includes a objective electrode, moving device for the objective electrode and a detecting means of moving distance of the objective electrode. The moving device is controlled depending on the signal from the objective electrode to position it in a predetermined range of clearance. The distance between the object and the sensor device is calculated based on the signals from the detecting means and the objective electrode.
Claims15
A capacitive distance sensor adapted to measure a distance to an object surface, the distance sensor comprising:
- a cylindrical frame;
- an objective electrode;
- a rod disposed coaxially in the cylindrical frame to carry the objective electrode that is attached to the end of the rod;
- a rod support supporting the rod to be movable axially, including a restricting means for restricting radial movement of the rod;
- a linear motor axially moving the rod and disposed between the cylindrical frame and the rod;
- a clearance detector for detecting the clearance distance between the objective electrode and the object surface, based on a capacitance therebetween;
- a controller controlling the linear motor depending on a signal from said clearance detector to position said objective electrode within a predetermined range of the clearance distance;
- a moving distance detector for detecting a moving distance of the objective electrode;
- a distance calculator for calculating the distance based on the signals from the clearance detector and the moving distance detector for estimating an amount of ups and downs on the object surface.
Dependencies are inferred from the claim text.