Ferroelectric emitter
AssigneesSamsung Electronics Co., Ltd., Virginia Tech Intellectual Properties, Inc.
InventorIn-Kyeong Yoo
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Abstract
A ferroelectric emitter is described. The ferroelectric emitter of the present invention includes a ferroelectric layer having a first side, an opposing second side, and a top surface, a first and a second electrode formed along the top surface of the ferroelectric layer, and a mask layer which has a predetermined pattern and is formed along the top surface of the ferroelectric layer between the first and second electrodes. When used in ferroelectric switching emission lithography, the ferroelectric emitter of the present invention allows electron emission from a wide or narrow gap of a mask layer and from an isolated pattern such as a doughnut shape while facilitating re-poling in pyroelectric electron emission.
Claims6
A ferroelectric emitter comprising:
- a ferroelectric layer having a first side, an opposing second side and a top surface;
- a first electrode formed at the top surface and adjacent to the first side of the ferroelectric layer;
- a second electrode formed at the top surface and adjacent to the opposing second side of the ferroelectric layer;
- a mask layer having a predetermined pattern is formed along the top surface of the ferroelectric layer between the first and second electrodes.
A ferroelectric emitter comprising:
- a ferroelectric layer having a first side edge, an opposing second side edge, and a top surface;
- a first electrode formed along the first side edge of the ferroelectric layer;
- a second electrode formed along the opposing second side edge of the ferroelectric layer;
- and
- a mask layer having a predetermined region is formed along the top surface of the ferroelectric layer between the first and second electrodes.
Dependencies are inferred from the claim text.