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US 6,479,921 B2Granted
Micro-electromechanical structure resonator, method of making, and method of using
AssigneeIntel Corporation
InventorsQing Ma, Peng Cheng
Life of this patent
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Abstract
The invention relates to a hollow microbeam that is fabricated upon a base or pedestal. Processing of the hollow microbeam includes forming at least one hollow channel in the microbeam by removing temporary fillers after formation of the microbeam. The inventive microbeam may provide at least an order of magnitude increase in oscillational frequency over a solid microbeam.
Claims22
A read/write resonator system comprising:
- a drive electrode;
- a hollow microbeam disposed adjacent the drive electrode, wherein the hollow microbeam comprises:
- an exterior wall;
- an interior wall;
- a channel between the exterior wall and the interior wall;
- and
- a read/write tip disposed upon the microbeam.
4 more elements
A method of oscillating a microbeam comprising:
- providing a hollow microbeam that is suspended above a drive electrode;
- and;
- imparting a driving force from the drive electrode upon the hollow microbeam under conditions to cause the microbeam to oscillate at a resonant frequency.
A method of making a resonator comprising:
- providing a substrate;
- providing a base upon the substrate;
- providing a first filler upon the substrate and abutting the base;
- forming a resonator lower section upon the base and the first filler;
- patterning a second filler upon the resonator lower section;
- forming a resonator external wall, a resonator internal wall, and a resonator upper section upon the resonator lower section and the second filler;
- removing the first filler;
- and
- removing the second filler.
6 more elements
The method of making a resonator according to clime 15, wherein removing the second filler comprises:
- forming at least one etch through-hole that stops on the substrate.
Dependencies are inferred from the claim text.