Microfabricated filter and shell constructed with a permeable membrane
AssigneeThe Regents of the University of California
InventorsKyle S. Lebouitz, Roger T. Howe, Albert P. Pisano
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Abstract
A method of fabricating a microfabricated filter. The method includes forming a frame structure and forming a plurality of openings through the frame structure. A permeable polysilicon membrane is formed over the plurality of openings through the frame structure. At least part of the sacrificial structure is etched with an etchant wherein the etchant passes through the permeable polysilicon membrane. The permeable polycrystal silicon membrane may have a thickness of between about 0.05 micrometers and about 0.30 micrometers.
Claims12
A method for fabricating a microfabricated filter, comprising steps of:
- forming a frame structure;
- forming a plurality of openings through said frame structure;
- and
- forming a permeable polycrystalline silicon membrane over said plurality of openings through said frame structure, wherein said permeable polycrystalline silicon membrane has a thickness of between about 0.05 micrometers and about 0.3 micrometers.
A method for fabricating a microfabricated filter, comprising steps of:
- providing a bulk substrate having a surface;
- forming a sacrificial structure over at least part of said surface of said bulk substrate;
- forming a frame structure having a plurality of openings over at least part of said sacrificial structure and said surface of said bulk substrate;
- forming a permeable polycrystalline silicon membrane over at least part of said frame structure;
- and
- etching at least part of said sacrificial structure with an etchant, wherein said etchant passes through said permeable polycrystalline silicon membrane.
A method for fabricating a microfabricated filter, comprising the steps of:
- providing a bulk substrate having a surface;
- forming a sacrificial layer over at least part of said surface of said bulk substrate;
- removing at least part of said sacrificial layer to expose at least part of said surface of said bulk substrate;
- forming a frame layer over at least part of said sacrificial layer and said surface of said bulk substrate;
- forming a plurality of openings through said frame layer;
- forming a permeable polycrystalline silicon layer over at least part of said frame layer and said plurality of openings through said frame layer;
- and
- etching at least part of said sacrificial layer with an etchant, wherein said etchant passes through said permeable polycrystalline silicon layer.
A method for fabricating a microfabricated shell, comprising the steps of:
- providing a bulk substrate having a surface;
- forming a sacrificial structure over at least part of said surface of said bulk substrate;
- forming a frame structure having a plurality of openings over at least part of said sacrificial structure and said surface of said bulk substrate;
- forming a permeable membrane over at least part of said frame structure;
- and
- etching at least part of said sacrificial structure with an etchant, wherein said etchant passes through said permeable membrane.
A method for fabricating a microfabricated shell, comprising the steps of:
- providing a bulk substrate having a surface;
- forming a sacrificial layer over at least part of said surface of said bulk substrate;
- removing at least part of said sacrificial layer to expose at least part of said surface of said bulk substrate;
- forming a frame layer over at least part of said sacrificial layer and said surface of said bulk substrate;
- forming a plurality of openings through said frame layer;
- forming a permeable polycrystalline silicon layer over said plurality of openings through said frame layer;
- etching at least part of said sacrificial layer with an etchant, wherein said etchant passes through said permeable polycrystalline silicon layer;
- and
- forming a sealing layer over said permeable polycrystalline silicon layer.
Dependencies are inferred from the claim text.