Photo-electric combined substrate, optical waveguide and manufacturing process therefor

A photo-electric structure comprising:

• a. an interconnection substrate having electrical interconnections formed on opposing surfaces and additional interconnections therebetween coupled by at least one interlayer via;
• b. a fine interconnection part positioned on top of said interconnection substrate and having an electric insulating layer and a conductor layer therein;
• c. an optical waveguide positioned on top of said interconnection substrate and having a core and a cladding;
• and
• d. wherein the electrical insulating layer of the fine interconnection part and the optical waveguide are made of the same material.

A photo-electric structure comprising:

• a. an interconnection substrate having electrical interconnections formed on opposing surfaces and additional interconnections therebetween coupled by at least one interlayer via:
• b. a fine interconnection part on the whole upper surface of said interconnection substrate and having an electric insulating layer and a conductor layer therein;
• c. an optical waveguide formed in said fine interconnection part and having an optical-transmitting core and an optical-receiving core layer;
• and
• d. wherein the electrical insulating layer of the fine interconnection part and the optical waveguide are made of the same material.