X-ray analysis device with X-ray optical semi-conductor construction element

Abstract

An X-ray analysis device (1) having an X-ray source (2) for illuminating a sample (6) with X-radiation (4), a sample support for receiving the sample (6) and a detector (12,14) for detecting the diffracted or scattered X-radiation or fluorescent X-radiation (4′) emitted by the sample, wherein an X-ray optical construction element of semi-conductor material having a plurality of channels which are essentially transparent to X-radiation (4,4′) is provided in the path of rays between the X-ray source (2) and the detector (12,14), is characterized in that the X-ray optical construction element comprises a semi-conductor wafer (20;30a;30b;40;50) into which micropores (21;31;41) are etched which extend essentially in parallel in the direction of the rays and have diameters of 0.1 to 100 μm, preferably 0.5 and 20 μm. Such X-ray optical construction elements are, on the one hand, not poisonous, and on the other hand particularly transparent for X-rays, wherein a relatively high mechanical rigidity can be achieved also with large openings and very short construction lengths and thus also a particularly long service life and high pressure stability and density.

Dependencies are inferred from the claim text.