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US 6,476,968 B1Granted
Optical element
AssigneeCanon Kabushiki Kaisha
InventorsHideo Kato, Hiroshi Maehara
Life of this patent
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Abstract
Disclosed is an optical element including a substrate made of a monocrystal of a fluoride compound, and a fine structure formed on the substrate and made of a non-monocrystal of metal fluoride. Also disclosed are an optical system having such optical element, and an exposure apparatus having such optical system incorporated therein.
Claims24
An optical element comprising:
- a substrate made of a monocrystal of a fluoride compound;
- and
- a fine structure formed on the substrate and made only of a non-monocrystal of metal fluoride.
An optical element comprising:
- a substrate made of a monocrystal of a fluoride compound;
- and
- a fine structure formed on the substrate and made only of a non-monocrystal of calcium fluoride.
Dependencies are inferred from the claim text.