Probe contact system having planarity adjustment mechanism

A planarity adjustment mechanism for a probe contact system for establishing electrical connection with contact targets, comprising:

• a contact substrate having a plurality of contactors mounted on a surface thereof;
• a probe card for establishing electrical communication between the contactors and a test head of a semiconductor test system;
• a conductive elastomer having an elastic sheet provided between the contact substrate and the probe card;
• connection means for fixedly connecting the contact substrate with the probe card;
• a gap sensor for measuring a distance between the contact substrate and the contact targets in a non-contact manner, the gap sensor being directly formed on the contact substrate;
• a probe card ring mounted on a frame of the probe contact system for mounting the probe card on an inner area thereof;
• and
• a plurality of shims provided between the probe card and the probe card ring at three or more locations wherein the shim is a piece of thin film or plate and a number of shims at each of the locations is adjusted so that distances between tips of the contactors and surfaces of the contact targets become identical to one another.