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AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Toshikatsu Kashiwaya, Nobuo Takahashi
Estimating the term…
A ceramic element comprises a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24a, 24b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 for supporting the main actuator element 26, and a fixed section 20 for supporting the vibrating section 18 in a vibrating manner. The anti-ferroelectric film 22 after polarization has a region Zt in which its average dielectric constant is increased in an analog manner in accordance with a voltage V applied to the pair of electrodes 24a, 24b. Specifically, an expression of p/t≦2.5 is satisfied provided that an average film thickness of the anti-ferroelectric film 22 is t, and a pitch between the pair of electrodes 24a, 24b is p. Accordingly, the mechanical displacement amount is changed in an analog manner in accordance with the applied voltage, making it possible to maintain a displacement amount equivalent to that obtained during application of a driving voltage, in a no voltage-loaded state after completion of application of the driving voltage.
A relay device comprising an opposing terminal section, and a driving unit provided opposingly to one side of said opposing terminal section and including a number of actuator elements arranged corresponding to a large number of switching elements, for switching and controlling ON/OFF operation of said switching element by controlling displacement action of each of said actuator elements in a direction to make contact or separation with respect to said opposing terminal in accordance with an attribute of a driving signal to be inputted, wherein said actuator element comprises:
Dependencies are inferred from the claim text.