Piezoelectric/electrostrictive device and method of manufacturing same
AssigneeNGK Insulators, Ltd.
InventorsYukihisa Takeuchi, Tsutomu Nanataki, Koji Ikeda, Koji Kimura, Kazuyoshi Shibata
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Abstract
A piezoelectric/electrostrictive device including a pair of mutually opposing thin plate sections and a fixation section for supporting the thin plate sections. A piezoelectric/electrostrictive element is arranged on each of the pair of thin plate sections. Movable sections, having mutually opposing end surfaces, are formed proximate the ends of the thin plate sections. A distance between the end surfaces is not less than a length of the movable sections.
Claims6
A method for producing a piezoelectric./electrostrictive device comprising:
- a pair of mutually opposing thin plate sections and a fixation section for supporting said thin plate sections;
- movable sections provided at forward end portions of said pair of thin plate sections;
- and
- one or more piezoelectric/electrostrictive elements arranged on at least one thin plate section of said pair of thin plate sections, said method comprising:
- a step of forming said movable sections or said fixation section having mutually opposing end surfaces wherein a distance between said end surfaces is not less than a length of said movable section, by cutting off a predetermined part of any one of a portion to be formed into said movable sections or a portion to be formed into said fixation section after producing at least said piezoelectric/electrostrictive element on said thin plate section.
A method for producing a piezoelectric/electrostrictive device comprising:
- a pair of mutually opposing thin plate sections and a fixation section for supporting said thin plate sections;
- movable sections provided at forward end portions of said pair of thin plate sections;
- and
- one or more piezoelectric/electrostrictive elements arranged on at least one thin plate section of said pair of thin plate sections, said method comprising:
- a step of producing a ceramic laminate by integrally sintering a ceramic green laminate including at least a ceramic green sheet having a window and ceramic green sheets to be formed into said thin plate sections thereafter to produce said ceramic laminate;
- a step of forming said piezoelectric/electrostrictive element on an outer surface of a portion of said ceramic laminate to be formed into said thin plate section;
- and
- a cutoff step of forming said movable sections or said fixation section having at least mutually opposing end surfaces wherein a distance between said end surfaces is not less than a length of said movable section, by means of at least one time of cutoff treatment for said ceramic laminate formed with said piezoelectric/electrostrictive element.
Dependencies are inferred from the claim text.