Semiconductor device having columnar electrode and method of manufacturing same
AssigneeFujitsu Limited
InventorsKazuyuki Imamura, Yasunori Fujimoto, Masaaki Seki, Tetsuya Fujisawa, Mitsutaka Sato, Ryuji Nomoto, Junichi Kasai, Yoshitaka Aiba, Noriaki Shiba
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