Nano-structures, process for preparing nano-structures and devices

#1. Field of the Invention

#The present invention relates to nano-structures and devices using the same, and a process for preparing the nano-structures. Particularly, the present invention relates to nano-structures having pores, which is believed to be widely used as, for example, electronic and optical devices, functional materials for micro-devices, structural materials, etc., devices using the nano-structures, and a process for preparing the nano-structures.

#2. Description of the Related Art

#FIG. 1A is a schematic plan view of a nano-structure of the present invention;

#FIG. 1B is a sectional view taken along line AA in FIG. 1A;

#FIGS. 2A to D are schematic plan views respectively showing pore arrangements of nano-structures of the present invention;

#Construction of Nano-structure

#FIG. 1 is a schematic plan view showing the construction of a nano-structure of the present invention which has two kinds of pores having different diameters. In FIG. 1, reference numeral 1 denotes a workpiece (aluminum); reference numeral 3, a first pore (nano-hole); reference numeral 4, a barrier layer. Reference numeral 5 denotes a second pore having a smaller diameter than that of the first pores 3.

#This nano-structure comprises anodic porous alumina having pores and obtained by anodically oxidizing aluminum, the anodic porous alumina having at least two kinds of the pores 3 and 5 having different diameters. The pores 3 of the anodic porous alumina have a cylindrical shape, and the pores 3 and 5 can be arranged in substantially parallel at equal intervals.