Apparatus for pyroelectric emission lithography using patterned emitter
AssigneesSamsung Electronics Co., Ltd., Virginia Tech Intellectual Properties, Inc.
InventorIn-Kyeong Yoo
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Abstract
A method and an apparatus for pyroelectric lithography using a patterned emitter is provided. In the apparatus for pyroelectric lithography, a pyroelectric emitter or a ferroelectric emitter is patterned using a mask and it is then heated. Upon heating, electrons are not emitted from that part of the emitter covered by the mask, but are emitted from the exposed part of the emitter not covered by the mask so that the shape of the emitter pattern is projected onto the substrate. To prevent dispersion of emitted electron beams, which are desired to be parallel, the electron beams are controlled using a magnet or a projection system, thereby achieving exact a one-to-one projection or a x-to-one projection of the desired pattern etched on the substrate.
Claims9
An apparatus for providing a one-to-one projection of pyroelectric emission lithography, comprising:
- a plate type emitter formed of a pyroelectric material;
- a mask stacked on the plate type emitter in a desired pattern, the mask allowing electrons to be emitted from the plate type emitter in a desired pattern;
- a substrate which carries an object to be etched to form the desired pattern;
- an electron resist deposited on the substrate, the electron resist being sensitive to the emitted electrons;
- a heating source for heating the plate type emitter;
- a power supply for applying a voltage between an emitter structure and the object to be etched to allow the electrons to be emitted from the emitter structure and applied to the object to be etched, the emitter structure comprising the plate type emitter and the mask, and the object to be etched comprising the substrate and the electron resist;
- and
- magnets disposed outside the emitter structure and the object to be etched, the magnets controlling the path of the electrons emitted from the emitter structure towards the object to be etched.
An apparatus for an x-to-one projection of pyroelectric emission lithography, comprising:
- a plate type emitter formed of a pyroelectric material;
- a mask stacked on the plate type emitter in a desired pattern, the mask allowing electrons to be emitted from the plate type emitter in a desired pattern;
- a substrate which carries an object to be etched to form the desired pattern;
- an electron resist deposited on the substrate, the electron resist inducing the emitted electrons;
- a heating source for heating the plate type emitter;
- a power supply for applying a voltage between an emitter structure and an object to be etched to allow the electrons to be emitted from the emitter structure and applied to the object to be etched, the emitter structure comprising the plate type emitter and the mask, and the object to be etched comprising the substrate and the electron resist;
- and
- a projection system disposed between the emitter structure and the object to be etched for controlling the path of the electrons emitted from the emitter structure towards the object to be etched.
Dependencies are inferred from the claim text.