Moving photocathode with continuous regeneration for image conversion in electron beam lithography
AssigneeApplied Materials, Inc.
InventorsLee H. Veneklasen, Marian Mankos, Bart Scholte van Mast
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Abstract
A moving photoconverter device that converts an incident light image into an equivalent electron or other charged particle beam image. The moving photoconverter is ring shaped and is rotated by using a motor such that the incident light image exposes a moving photoconverter surface. The photoconverter may additionally or alternatively move in an X-Y motion or radially. Continuous regeneration is provided at a site remote from the region of moving photoconverter device that converts an incident light image into an equivalent electron or other charged particle beam image.
Claims35
A beam conversion system comprising:
- a photoconverter on which is incident a light image, thereby to convert the light image into a charged particle emission pattern;
- an electron optical system that demagnifies and focuses the emission pattern onto a resist coated substrate;
- and
- a displacement device comprising a motor, the displacement device being coupled to rotate the photoconverter, wherein the light image illuminates a rotating surface of the photoconverter.
A method of generating a charged particle beam image from a light optical image, the method comprising the acts of:
- generating a light image;
- providing a motor to rotate a photoconverter;
- directing the image onto the photoconverter whereby the image is incident on a rotating surface of the photoconverter;
- converting, at the photoconverter, the image into a charged particle emission pattern;
- demagnifying the emission pattern;
- and
- focusing the demagnified emission pattern onto a substrate.
A method of generating a charged particle pattern, comprising the steps of:
- generating a light image;
- providing a photoconverter;
- providing a motor to rotate the photoconverter;
- rotating the photoconverter relative to an axis of the light image;
- directing the light image onto the rotating photoconverter, whereby the image is incident on a rotating surface of the photoconverter;
- converting, at the photoconverter, the light image into a charged particle pattern;
- demagnifying the charged particle pattern;
- and
- focusing the demagnified charged particle pattern onto a target.
Dependencies are inferred from the claim text.