Beam automation in charged-particle-beam systems
AssigneeApplied Materials, Inc.
InventorsLi Xu, Richard Barnard
Life of this patent
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Abstract
Embodiments in accordance with the invention provide respectively for auto-focus, auto-contrast, and auto-correction of astigmatism in both x and y directions, are independent of focus-induced-image-rotation, sample feature orientation and image deformation, and focus-induced-image magnification change, and are insensitive to various kinds of noise. Poor image contrast is handled by an auto-contrast capability. Embodiments in accordance with the invention can achieve high reliability and repeatability, while providing for faster operation than most prior-art methods.
Claims44
An automated method for setting parameters of a focused-particle-beam column to acquire a focused image of a sample, comprising:
- a. Aligning the column,
- b. Acquiring an image of the sample having a focus-rotation center in the image,
- c. Setting image contrast, and
- d. Setting column focus.
An imaging system having a focused-particle-beam column and control apparatus for setting parameters of the column to acquire a focused image of a sample by:
- a. Aligning the column,
- b. Acquiring an image of the sample having a focus-rotation center in the image,
- c. Setting image contrast, and
- d. Setting column focus.
Dependencies are inferred from the claim text.