Nano-pattern lithographic fabrication using pulled micro-pipette and method thereof
AssigneeWon Ho Jhe
InventorsWon Ho Jhe, Ki Hyun Kim
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Abstract
A nano-pattern lithographic fabrication apparatus for fabricating a fine pattern using a pulled micro-pipette is disclosed. This apparatus includes a container for receiving a certain solution therein, a container controlling unit for controlling the movement of the container and an ejection of the solution filled in the container, a sample moving unit for supporting and moving the sample, a detector for detecting a distance between the container controlling unit and the sample moving unit, and a controlling unit for receiving a detection signal from the detector and controlling the movement of the container and the sample moving unit and a distance therebetween.
Claims11
A nano-pattern lithographic fabrication apparatus, comprising:
- a container for receiving a nano-pattern generating solution therein;
- a sample on which a pattern is formed by the solution;
- a container controlling unit for controlling the movement of the container and ejecting the nano-pattern generating solution filled in the container on the sample, wherein said container controlling unit comprises:
- a first displacement generating unit for vibrating the container at a resonant frequency;
- and
- a second displacement generating unit for pressurizing the container thereby ejecting the nano-pattern generating solution therefrom;
- a sample moving unit for supporting and moving the sample;
- a detector for detecting a distance between a dispensing end portion of the container and a surface of the sample;
- and
- a controlling unit for receiving a detection signal from the detector and controlling the movement of the container and the sample moving unit and a distance there between.
Dependencies are inferred from the claim text.