Auto-bake out system
AssigneeChartered Semiconductor Manufacturing Ltd.
InventorMyo Myint Maung
Life of this patent
Estimating the term…
Abstract
Described is a system designed to warm the transfer chamber used in vacuum equipment in the manufacture of integrated circuits during maintenance. The system detects when the transfer chamber lid is opened and the chamber is exposed to the atmosphere. This activates the heater normally used to bake out the chamber. A temperature sensor is used to keep the temperature below a set point. By warming the chamber, moisture build-up on the inside of the chamber during maintenance is minimized, thereby reducing out gassing and time required to bring the chamber back to its base vacuum pressure when returned to production.
Claims23
A chamber heater system used to prevent moisture accumulation in vacuum chambers comprising:
- a heater;
- a lid open sensor detecting when said chamber is open and exposed to atmospheric pressure;
- a temperature sensor detecting when said chamber has reached a set temperature;
- and
- a bake out power driver circuit which activates said heater only when said chamber is open and said chamber temperature is below said set temperature and which deactivates said heater when said chamber reaches said set temperature or when said chamber is closed.
A chamber heater system used to prevent moisture accumulation in vacuum chambers comprising:
- a heater;
- a lid open sensor detecting when said chamber is open and exposed to atmospheric pressure;
- a temperature sensor detecting when said chamber has reached a set temperature;
- and
- a bake out power driver circuit which activates said heater only when said chamber is below said set temperature and is open and exposed to atmospheric pressure.
A chamber heater system used to prevent moisture accumulation in vacuum chambers comprising:
- a heater;
- a lid open sensor detecting when said chamber is open and exposed to atmospheric pressure wherein said lid open sensor is a reed switch wherein said switch is open when said chamber is open and exposed to atmospheric pressure;
- a temperature sensor detecting when said chamber has reached a set temperature wherein said temperature sensor is a thermal switch;
- and
- a bake out power driver circuit which activates said heater only when said chamber is below said set temperature and is open and exposed to atmospheric pressure.
A method used to prevent moisture accumulation in a vacuum chamber wherein said vacuum chamber comprises:
- a heater;
- a lid open sensor detecting when said chamber is open and exposed to atmospheric pressure;
- a temperature sensor detecting when said chamber has reached a set temperature;
- and
- a bake out power driver circuit wherein said method comprises:
- activating said heater only when said chamber is below said set temperature and is open and exposed to atmospheric pressure;
- and deactivating said heater when said chamber reaches said set temperature or when said chamber is closed.
A method used to prevent moisture accumulation in a vacuum chamber wherein said vacuum chamber comprises:
- a heater;
- a lid open sensor detecting when said chamber is open and exposed to atmospheric pressure wherein said lid open sensor is a reed switch wherein said switch is open when said chamber is open and exposed to atmospheric pressure;
- a temperature sensor detecting when said chamber has reached a set temperature wherein said temperature sensor is a thermal switch;
- and
- a bake out power driver circuit wherein said method comprises:
- activating said heater only when said chamber is below said set temperature and is open and exposed to atmospheric pressure;
- and deactivating said heater when said chamber reaches said set temperature or when said chamber is closed.
Dependencies are inferred from the claim text.