Cassette invertor method
AssigneeMicron Technology, Inc.
InventorsJeffrey K. Mendiola, Willard L. Hofer
Life of this patent
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Abstract
A method of inverting a plurality of plate-like materials. One form of the method may include supporting the plurality of plate-like materials in an orientation such that the plate-like materials are substantially parallel to each other in a first orientation. The method may also include engaging portions of each plate-like material to retain the plate-like materials in the substantially parallel orientation to each other, and simultaneously inverting the plate-like material to a second orientation.
Claims10
A method of inverting a plurality of plate-like materials, said method comprising:
- supporting the plurality of plate-like materials in an orientation such that the plate-like materials are substantially parallel to each other in a first orientation;
- engaging portions of each plate-like material to retain the plate-like materials in the substantially parallel orientation to each other;
- and
- simultaneously inverting the plate-like materials to a second orientation.
A method of inverting a plurality of plate-like materials supported within a cassette, said method comprising:
- restraining each plate-like material within the cassette;
- and
- rotating the cassette about a pivot axis.
A method of simultaneously inverting plate-like materials, said method comprising:
- forming a stack of plate-like materials;
- engaging portions of each plate-like material within the stack;
- and
- rotating the stack about a pivot axis.
A method for applying a surface treatment to semiconductor wafers comprising:
- forming a stack of semiconductor wafers separately supported at their respective edges;
- retaining the semiconductor wafers within the stack;
- inverting the stack of semiconductor wafers;
- removing a semiconductor wafer from the stack;
- and
- applying a surface treatment to the semiconductor wafer.
Dependencies are inferred from the claim text.