Piezoelectric device with sealed vibration space and manufacturing method thereof

A method of manufacturing a piezoelectric device comprising the steps of:

• forming a first film structure and a second film structure wherein:
• said first film structure comprises the steps of:
• applying a first resist resin to a first surface of a piezoelectric substrate having numerous sets of electrodes each constituted of a first electrode and a second electrode facing opposite each other at said first surface and a second surface, so as to individually cover said first electrodes;
• forming a first resin layer to constitute a first hollow layer on said first surface of said piezoelectric substrate where said first resist resin is not present;
• forming a through hole corresponding to each of said first electrodes by removing said first resist resin;
• and
• forming a first sealing layer over said first resin layer;
• said second film structure comprises the steps of:
• applying a second resist resin to said second surface of said piezoelectric substrate so as to individually cover said second electrodes;
• forming a second resin layer to constitute a second hollow layer on said second surface of said piezoelectric substrate where said second resist resin is not present;
• forming a second through hole corresponding to each of said second electrodes by removing said second resist resin;
• and
• forming a second sealing layer over said second resin layer.