Method for improved low pressure inductively coupled high density plasma reactor

A method of operating a plasma reactor, comprising:

• igniting a plasma in a chamber with substantially capacitive electric energy coupled from a radiator into the chamber;
• tuning a variable impedance network so that the capacitive electric energy coupled into the chamber is diminished;
• powering the plasma with substantially magnetic energy;
• completing the igniting when the plasma is substantially inductively coupled powered;
• and
• wherein the completing includes completing the ignition when plasma density is greater than 1010 cm−3.

A method of operating a plasma reactor, comprising:

• igniting a plasma in a chamber with substantially capacitive electric energy coupled from a radiator into the chamber;
• tuning a variable impedance network so that the capacitive electric energy coupled into the chamber is diminished;
• and
• powering the plasma with substantially magnetic energy when the plasma density is greater than 1011 cm−3.

A method of operating a plasma reactor, comprising:

• igniting a plasma in a chamber with substantially capacitive electric energy coupled from a radiator;
• tuning a first series variable capacitor and a shunt variable capacitor to enhance the energy transfer between an electromagnetic energy source and the radiator;
• tuning a second series variable capacitor electrically connected between the coil and ground to change the location at which the capacitive electric energy is coupled;
• and
• powering the plasma with substantially magnetic energy completing the igniting when the plasma is substantially inductively powered;
• and wherein the completing includes completing the ignition when plasma density is greater than 1010 cm−3 .

A method of operating a plasma reactor, comprising:

• igniting a plasma in a chamber with substantially capacitive electric energy coupled from a radiator;
• tuning a variable capacitor electrically connected between the coil and ground to change the location at which the capacitive electric energy is coupled;
• powering the plasma with substantially magnetic energy;
• completing the igniting when the plasma is substantially inductively powered;
• and
• wherein the completing includes completing the ignition when plasma density is greater than 1010 cm−3.

A method of operating a plasma reactor, comprising the steps of:

• igniting a plasma in a chamber with substantially capacitive electric energy coupled from a radiator;
• tuning a variable capacitor electrically connected between the coil and ground to change the location at which the capacitive electric energy is coupled;
• and
• powering the plasma with substantially magnetic energy when the plasma density is greater than 1010 cm−3.

A method of operating a plasma reactor, comprising:

• turning on an electromagnetic energy source to a radiator;
• tuning a first series variable capacitor and a shunt variable capacitor positioned between the electromagnetic source and a first end of the radiator to enhance the energy transfer between the electromagnetic energy source and the radiator;
• tuning a second series variable capacitor, connected between a second end of the radiator and ground, to a relatively low capacitance value to vary the voltage-standing-wave on the radiator so that a relatively high electric potential exists between the exposed portion of the radiator and a nearby conductive wall of the chamber;
• reducing the pressure of a gas in the chamber to less than approximately 80 millitorr to permit an avalanche effect to be created by electrons accelerated by capacitive electric energy to ignite a plasma in the gas;
• powering the plasma with mostly magnetic energy after completing ignition of the plasma to create a plasma density greater than 1010 cm−3;
• reducing the pressure in the chamber to less than approximately 30 millitorr;
• re-tuning the first series variable capacitor and the shunt variable capacitor to enhance the energy transfer between the electromagnetic energy source and the plasma;. and re-tuning the second variable capacitor to a higher capacitance value to vary the voltage-standing-wave on the radiator so that a region of relatively high electric potential of the radiator is repositioned to a portion of the radiator that is electrically isolated from the chamber by a shield.