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US 6,475,606 B2Granted
Ceramic board for apparatuses for semiconductor manufacture and inspection
AssigneeIbiden Co., Ltd.
InventorTakeo Niwa
Life of this patent
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Abstract
The present invention has for its object to inhibit decrease in Young's modulus at high temperature without compromise in various other characteristics such as heat conductivity. The present invention is directed to a ceramic board for semiconductor manufacture and inspection comprising a conductor layer internally or on the surface thereof which is composed of nitride ceramics containing oxygen and 0.1 to 50 ppm (wt.) of Si.
Claims4
A ceramic board for apparatuses for semiconductor manufacture and inspection comprising a conductor layer formed internally or on a surface thereof,
- which is composed of nitride ceramics containing 0.1 to 5 weight % of oxygen and 0.1 to 50 ppm of Si.
Dependencies are inferred from the claim text.