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US 6,475,563 B2Granted
Method for forming a thin film using a gas
AssigneeCanon Kabushiki Kaisha
InventorsYukihiro Hayakawa, Yasushi Kawasumi, Kenji Makino, Yuzo Kataoka
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Abstract
A method for forming a thin film on a substrate using a gas includes providing a substrate in a reaction chamber. A head for emitting a gas in the reaction chamber is disposed opposite the substrate. This step includes mounting a detachable gas liberating surface to the head so that the distance between the head and the substrate surface is 10 mm or less. Gas is then emitted from the head into the reaction chamber.
Claims2
A method form forming a thin film on a substrate by thermal chemical vapor deposition, comprising the steps of:
- providing a substrate in a reaction chamber;
- providing a rectifying plate having a plurality of openings for passing a gas;
- mounting a head having a detachable gas liberating surface to a head for emitting a gas in the reaction chamber in opposition to a substrate surface such that the distance between the head and the substrate surface is 10 mm or less, the head having a plurality of plate members each having a surface intersecting the rectifying plate;
- feeding the gas to the head through the rectifying plate;
- and
- emitting the gas from the head into the reaction chamber.
3 more elements
Dependencies are inferred from the claim text.