Heat sink substrate consisting essentially of copper and molybdenum and method of manufacturing the same
AssigneeTokyo Tungsten Co., Ltd.
InventorsMitsuo Osada, Akira Ichida, Norio Hirayama, Kiyoshi Asai, Hidetoshi Maesato, Tadashi Arikawa
Life of this patent
Estimating the term…
Abstract
A heat sink substrate comprises a Cu—Mo composite substrate composed of a molybdenum (Mo) green compact with which Copper (Cu) of 20-60 wt % is impregnated. It is preferable that the heat sink substrate is a rolled plate obtained by repeatedly warm rolling or cold rolling the Cu—Mo composite substrate and that the rolled plate does not include any fine void and unevenly impregnated copper, that is, copper and molybdenum are uniformly distributed therein.
Claims19
A method of manufacturing a Cu—Mo composite heat sink substrate, comprising the steps of:
- forming a green compact by compacting a molybdenum powder having an average particle size, by the FSSS grain size, of 2-6 μm by a hydraulic press or a cold isostatic press (CIP) at a pressure of 5 ton/cm2 or less;
- and
- impregnating the molybdenum green compact with copper of 20-60 wt % of the total weight of the molybdenum green compact and the impregnated copper in a reducing or inert gas atmosphere furnace at 1080-1300° C. to thereby obtain a Cu—Mo composite substrate.
A method of manufacturing a Cu—Mo heat sink substrate, comprising the steps of:
- mixing a molybdenum powder having an average particle size, by the FSSS grain size, of 2-6 μm with a copper powder of 5% or less;
- forming a green compact by compacting a resultant mixed powder by a hydraulic press or a cold isostatic press (CIP) at a pressure of 5 ton/cm2 or less;
- and
- impregnating the green compact with copper of 40-60 wt % of total weight of said green compact and the impregnated copper in a reducing or inert gas atmosphere furnace at 1083-1300° C. to thereby obtain a Cu—Mo composite substrate.
A method of manufacturing a heat sink substrate, comprising the step of:
- sufficiently mixing a copper powder with a molybdenum powder;
- forming a green compact by compacting a resulting mixture by a cold isostatic press (CIP) within a thickness range of 3-14 mm;
- sintering the green compact at a prescribed sintering temperature and quenching the same;
- and
- rolling a sintered green compact while suppressing a reduction ratio of rolling to 25-40% in thickness to thereby obtain a large area heat sink substrate whose characteristic anisotropy is suppressed in a substrate surface direction.
A method of manufacturing a heat sink substrate, comprising the steps of:
- sufficiently mixing a copper powder with a molybdenum powder;
- forming a green compact by compacting a resultant mixture by a press within a thickness range of 4.5-20 mm;
- sintering the green compact at a prescribed sintering temperature and quenching the same;
- and
- forging the sintered green compact at a degree of forging of 50% or more to thereby obtain a large area heat sink substrate whose characteristic anisotropy is suppressed in a substrate surface direction.
Dependencies are inferred from the claim text.