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US 6,475,355 B2Granted
Process for coating amorphous carbon coating on to an x-ray target
AssigneeGenvac Aerospace Corporation
InventorsGerald T. Mearini, Hsiung Chen, Robert E. Kusner, Laszlo A. Takacs
Life of this patent
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Abstract
A method of manufacturing an x-ray target by positioning an x-ray target having an alloy surface and a graphite surface in a sputtering chamber is disclosed. The x-ray target is then coated over the graphite surface with non-hydrogenated amorphous carbon.
Claims9
A method of forming a coating on an x-ray target comprising:
- positioning an x-ray target including an alloy target section and a graphite section within a sputtering chamber and sputter depositing a non-hydrogenated amorphopus carbon coating over at least a portion of the graphite section.
Dependencies are inferred from the claim text.