Method of manufacturing electrode substrate
AssigneeCanon Kabushiki Kaisha
InventorsTsutomu Ikeda, Takehiko Kawasaki
Life of this patent
Estimating the term…
Abstract
An electrode substrate comprises a backing substrate carrying thereon a metal electrode layer and/or a recording layer, the layer or layers having a smooth surface area with a surface roughness of less than 1 nm by more than 1 μm2. The smooth surface of the metal electrode layer and/or the recording layer is formed by firstly forming the layer on another substrate having a corresponding smooth surface and then peeling the another substrate off the layer after the layer is bonded to the surface of the backing substrate, whereby the smooth surface profile of the another substrate is transferred to the surface of the layer formed on the backing substrate.
Claims8
A method of manufacturing an electrode substrate having a metal electrode layer comprising the steps of:
- forming a metal electrode layer on a first substrate;
- bonding said first substrate to a second substrate to form a combined body having a layered structure on said first substrate, said layered structure comprising said metal electrode layer, a low thermal expansion layer having a thermal expansion coefficient lower than said metal electrode layer, and a high thermal conduction layer having a thermal conductivity higher than said low thermal expansion layer;
- and
- peeling said first substrate off said metal electrode layer.
A method of manufacturing an electrode substrate having a metal electrode layer, characterized by comprising steps of:
- forming a metal electrode layer on a first substrate;
- bonding said first substrate and a second substrate to form a combined body having a layered structure on said first substrate, said layered structure comprising said metal electrode layer, a first layer comprising at least one selected form W, Ta, Mo, Cr, Ti and Zr and alloys of any of them as well as their compounds, and a second layer comprising at least one selected from Au, Ag, Cu and Al and alloys of any of them;
- and
- peeling said first substrate off said metal electrode layer.
Dependencies are inferred from the claim text.