Flextensional transducer
AssigneeHewlett-Packard Company
InventorAntonio S Cruz-Uribe
Life of this patent
Estimating the term…
Abstract
A flextensional transducer adapted to eject droplets of a fluid includes a substrate having a fluid cavity defined therein, a flexible membrane portion supported by the substrate, and an actuator associated with the flexible membrane portion. The flexible membrane portion has spaced edges and an orifice defined therein which communicates with the fluid cavity. The actuator is adapted to deflect the flexible membrane portion to eject droplets of fluid through the orifice in response to an electrical signal applied to the actuator.
Claims39
A flextensional transducer, comprising:
- a substrate having a fluid cavity defined therein;
- a flexible membrane portion supported by the substrate and having a pair of spaced edges and an orifice defined therein which communicates with the fluid cavity;
- and
- an actuator associated with the flexible membrane portion, wherein the actuator is adapted to deflect the flexible membrane portion in response to an electrical signal.
A method of forming a flextensional transducer, the method comprising the steps of:
- defining a fluid cavity in a substrate;
- supporting a flexible membrane portion by the substrate;
- defining a pair of spaced edges of the flexible membrane portion;
- communicating an orifice of the flexible membrane portion with the fluid cavity;
- and
- associating an actuator with the flexible membrane portion, wherein the actuator is adapted to deflect the flexible membrane portion in response to an electrical signal.
A method of ejecting droplets of a fluid, the method comprising the steps of:
- supplying a fluid cavity with the fluid;
- extending a flexible membrane portion having a pair of spaced edges and an orifice defined therein over the fluid cavity such that the orifice communicates with the fluid cavity;
- and
- deflecting the flexible membrane portion relative to the fluid cavity to eject a quantity of the fluid through the orifice of the flexible membrane portion when the flexible membrane portion deflects.
A flextensional transducer, comprising:
- a substrate having a fluid cavity defined therein;
- a flexible membrane portion supported by the substrate and having an orifice defined therein which communicates with the fluid cavity;
- an actuator associated with the flexible membrane portion, wherein the actuator is adapted to deflect the flexible membrane portion in response to an electrical signal;
- and
- a compliant feature adjacent the actuator, wherein the compliant feature facilitates deflection of the flexible membrane portion.
Dependencies are inferred from the claim text.