Cleaning device for probe needle of probe card and washing liquid used therefor
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorMasaharu Mizuta
Life of this patent
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Abstract
A cleaning device for a probe needle of a probe card rarely causing abrasion and deformation of the tip of a probe needle and capable of improving a probe needle life as well as a washing liquid used therefor are obtained. The tip of a probe needle of a probe card is immersed in a washing liquid for a probe needle of a probe card which includes an aqueous solution containing phosphoric acid or an aqueous solution containing chromic acid anhydride and phosphoric acid. While the tip of the probe needle is immersed in the washing liquid, the washing liquid is vibrated by a vibration generating member.
Claims2
A cleaning device for a probe needle of a probe card comprising:
- a washing bath for storing a washing liquid for a probe needle including an aqueous solution containing chromic acid anhydride and phosphoric acid, wherein
- a ratio of said chromic acid anhydride with respect to water is 20 grams/1 liter, and
- a ratio of said phosphoric acid with respect to water is 36 milliliters/1 liter;
- said washing bath includes means for holding a surface of said washing liquid in which said probe needle is immersed higher than a surface other than the portion in which said probe needle is immersed.
A cleaning device for a probe needle of a probe card comprising:
- a washing bath for storing a washing liquid for a probe needle including an aqueous solution containing chromic acid anhydride and phosphoric acid;
- said washing bath includes means for holding a surface of said washing liquid in which said probe needle is immersed higher than a surface other than the portion in which said probe needle is immersed,
- distance measuring means for measuring a distance between said probe needle and a surface of said washing liquid in said washing bath,
- position adjusting means for controlling a position of at least either of said probe needle and the surface of said washing liquid, and
- controlling means for controlling said position adjusting means based on information on the measured distance.
Dependencies are inferred from the claim text.