Corrosion-resistant diaphragm pressure sensor
AssigneeTem-Tech Lab. Co., Ltd.
InventorsMituyoshi Aizawa, Yoshinori Kawamura
Life of this patent
Estimating the term…
Abstract
A diaphragm pressure sensor (1) includes a pressure guide member (3) made of fluoroplastics for the admission of liquid chemicals, pressure of which is measured. A pressure frame (4) made of perfluoroalkoxy resin is integrated with the pressure guide member (3) to form a wetted part 6 of the liquid chemicals. A ceramic diaphragm (8) with built-in pressure sensor (7) is bonded to the surface of the pressure frame (4) opposite to the surface to which pressure is applied. A body (2) is provided for housing the pressure guide member (3), pressure frame (4) and diaphragm (8).
Claims10
A diaphragm pressure sensor comprising:
- a pressure guide member formed of fluoroplastics material so as to receive liquid chemicals therein to be measured;
- a pressure frame formed of perfluoroalkoxy resin and having a film-treated portion, said pressure frame being integrally connected to said pressure guide member so as to form an integrated liquid-containing part for containing the liquid chemicals;
- a ceramic diaphragm having an integral pressure sensor, a bonding surface of said diaphragm being bonded to a sensing surface of said film-treated portion opposite a pressure-receiving surface of said film-treated portion, said bonding surface being roughened and bonded to said sensing surface by a cyanoacrylate adhesive having organic amine compounds therein;
- and
- a body housing said pressure guide member, said pressure frame, and said diaphragm.
Dependencies are inferred from the claim text.