Method of making nitrided active elements
AssigneeStorage Technology Corporation
InventorsBradford C. Schwartz, Steven C. Herrera
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Abstract
A method of manufacturing an active element for use with a magnetic head includes depositing a magnetic material to form a magnetic member, and nitriding the magnetic member after the depositing step. Preferably, the depositing step comprises depositing nickel-iron alloy, and the nitriding step comprises plasma nitriding the magnetic member. Advantageously, plasma nitriding may be performed at a temperature below 300 degrees Celsius to avoid adverse effects to components of the active element, such as organic planars. Active elements manufactured according to the method of the invention are also disclosed.
Claims9
A method of manufacturing a magnetic head, the method comprising:
- depositing a first seed layer proximate a substrate;
- electroplating a first layer of nickel-iron alloy on the first seed layer to form a first magnetic pole;
- plasma nitriding the first magnetic pole at a temperature below 300 degrees Celsius;
- depositing a gap material on the first magnetic pole;
- depositing a second seed layer on the gap material;
- electroplating a second layer of nickel-iron alloy on the second seed layer to form a second magnetic pole;
- and
- plasma nitriding the second magnetic pole at a temperature below 300 degrees Celsius.
Dependencies are inferred from the claim text.