Intelligent minienvironment
AssigneeAsyst Technologies, Inc.
InventorsSalem Abuzeid, Xiaohua George He, George Tannous
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AssigneeAsyst Technologies, Inc.
InventorsSalem Abuzeid, Xiaohua George He, George Tannous
Estimating the term…
An intelligent minienvironment control system designed to optimize the minienvironment performance, improve the protection for the multi-million dollar equipment within a fab, and to improve the safety conditions for fab personnel. The intelligent minienvironment control system is comprised of a plurality of minienvironment control and monitoring systems (MCMSs), one such system being associated with each minienvironment in the fab. The MCMSs continuously monitor the environmental conditions within the minienvironments. Each of the MCMSs are linked together in a local area network to form an integrated fab-wide minienvironment management system. The management system also includes workstations linked to the network for storing historical data for, and allowing remote access to, each of the MCMSs in the system.
A control system for an environment isolated from ambient atmospheric conditions, comprising:
A control system for an environment isolated from ambient atmospheric conditions, comprising:
A control system for an environment isolated from ambient atmospheric conditions, comprising:
An integrated management system for environments isolated from ambient atmospheric conditions, comprising:
An integrated management system for environments isolated from ambient atmospheric conditions, comprising:
An integrated management system for environments isolated from ambient atmospheric conditions, comprising:
Dependencies are inferred from the claim text.